The DMF: SLAC's Superconducting Quantum Foundry

by Sherry Cho (SLAC National Accelerator Laboratory)

Thursday 27 Feb 2025, 12:00 → 13:00 US/Pacific

Auditorium (B50)

Recording: available after event

Poster to come.

 

 

Abstract: 

SLAC's Detector Microfabrication Facility (DMF) is a dedicated 5,500 sq. ft. foundry for the R&D and at-scale production of quantum and superconducting sensors and detectors with high uniformity, complexity, yield, and reproducibility.

In addition to a specialized toolset on 150mm wafers, the DMF also includes necessary capabilities for post-fabrication metrology, room-temperature and cryogenic characterization, as well as validation of functionality and performance of devices produced at the DMF.

The facility is envisioned to support DOE mission science by enabling collaborative research across universities, labs and industry in quantum information science and fundamental physics. I will give fabrication examples toward high yield and reproducible wafers and the status of DMF.

 

 

Speaker bio:

Fascinated by Josephson equations, Sherry has been producing superconducting devices and sensors for various applications ranging from medical application to cosmology over 30 years. The excitement of measuring fundamental physics that couldn’t be done with other technologies is another intrigues her.

 Sherry's involvement in astrophysics/cosmology led to the wafer scale production in superconducting transition edge sensors (TES) fielded both in Chile and the South Pole, and she was awarded with the APS fellow in 2015.

Currently, Sherry is involved in a novel superconducting quantum device for Axion search with DMRadio collaboration, TES and SQUIDs fabrication for CMB-S4, superconducting quantum devices fabrication with Q-NEXT center, and commissioning DMF (Detector Microfabrication Facility) clean room.